Suspended NEMS devices
Figure 5. (a) A series of parallel silicon beams fabricated by Harold Craighead and co-workers at Cornell University. Each beam resonates at a slightly different frequency. The highest frequency measured in an individual beam of this type is 380 MHz. (b) An ultrathin cantilever - width 5 µm and height 260 µm - developed by a collaboration between researchers at Stanford University and IBM's Almaden Research Center. The deflection of such a cantilever has been used to measure forces at the attonewton (1018 N) scale. (c) A device built at Ludwigs-Maximilians University that is used to shuttle individual electron charges between electrodes. (Picture credit: H Craighead/Cornell University, R Blick/LMU, T Kenny/Stanford University and D Rugar/IBM260)