Figure 1
(Left) Diagram showing deceleration of the primary beam in a SEM. The primary beam voltage is 2000 V and the specimen bias is 1950 V, which makes the effective beam voltage 50 V. This is equivalent to a landing energy of 50 eV — much lower than commonly used in a SEM. (Right) An image of tin spheres obtained using this deceleration technique. TLD-SE denotes secondary electron imaging using a through-the-lens detector. (Credit: Ingo Gestmann)