The switch
A schematic illustration of the carbon nanotube-based electromechanical switch
device
(a) Schematic of fabrication process: Three Nb electrodes were patterned
by electron-beam lithography, sputtering, and lift off. Similarly, Ni catalyst dots were also formed on the predefined locations for the growth of the carbon nanotubes. The nanotubes were then vertically grown from the Ni catalyst
dots using dc-PECVD.
(b) Illustration of carbon nanotube-based electromechanical
switch action (image and text: Appl. Phys. Lett. 87 163114
)