The Casimir force in microdevices
The Casimir force, which is most noticeable at submicron distances, can affect microelectromechanical systems, or MEMS.
(a) This MEMS device consists of a polysilicon plate suspended by a torsional rod only a few micrometres in diameter. When a metallized sphere (purple) approaches the plate, the attractive Casimir force between the two objects causes the plate to rotate around the rod.
(b) An electron micrograph of the device that shows the polysilicon plate. (c) A close-up of the rod. (Picture credit: Federico Capasso, Lucent Technologies)