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INTLVAC Feb 26, 2009
INTLVAC produces the Nanoquest line of Ion Beam Etch and Sputter Systems. The Nanaquest systems range from single wafer load-locked etch tools to multi-wafer batch tools. INTLVAC has a variety of in-house systems available to run customer samples.
Products from this company
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Nanoquest I - Ion Beam Etch System Jul 28, 2008
The NQI is an ideal R&D platform for Ion Beam Etch and Ion Beam Sputter.
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Nanoquest I-LL - Load Locked Ion Beam Etch System Jul 25, 2008
Load-locked Ion Beam Etch and Sputter tool with high-rate substrate cooling.