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About this event

Web site
spie.org/advanced-…
When
2226 Feb 2015
Where
San Jose, California, United States
Registration deadline
Feb 6, 2015
Organiser
SPIE - The international society for optics and photonics
Contact address
Customer Service
1000 20th St
Bellingham
WA
United States
Tel
1 360 676 3290
E-mail
customerservice@spie.org…

Conference/exhibition

SPIE Advanced Lithography 2015

SPIE Advanced Lithography is the premier conference for the lithography community. For 40 years, SPIE has brought together this community to address challenges presented in fabricating next-generation integrated circuits.
SPIE Advanced Lithography draws more than 2,400 attendees, 60 exhibitors, and 600 technical papers representing the most talented researchers and managers working in the lithography industry. Leading experts offer courses that will keep you and your team current.
Featuring presentations on:
+ Extreme Ultraviolet (EUV) Lithography
+ Alternative Lithographic Technologies
+ Metrology, Inspection, and Process Control for Microlithography
+ Advances in Patterning Materials and Processes
+ Optical Microlithography
+ Design-Process-Technology Co-optimization for Manufacturability
+ Advanced Etch Technology for Nanopatterning

Exhibition Overview: The Advanced Lithography Exhibition is a highly regarded exhibition for the industry's top semiconductor suppliers, integrators, and manufacturers. SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications for 40 years.

See the latest technology in advanced lithography:
+ Lithography: immersion, double patterning, e-beam, EUV, optical/laser, and RET
+ Metrology, inspection, OPC, and process control
+ Design and manufacturing software
+ Materials and chemicals
+ Imaging equipment
+ Lasers
+ Resist materials and processing
+ Nano-imprint
+ IC and chip fabrication
+ Etch for nanopatterning
+ Nanoscale imaging

Exhibition Dates and Hours:
Tuesday 24 February 2015 | 10:00 am to 5:00 pm
Wednesday 25 February 2015 | 10:00 am to 4:00 pm