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Nanoquest I-LL - Load Locked Ion Beam Etch System Jul 25, 2008
Load-locked Ion Beam Etch and Sputter tool with high-rate substrate cooling.
The NQI-LL is similar to the NQI but utilizes a magnetically coupled rotary linear drive to transport wafers into the etch chamber. The load lock enables faster turn around times and spectacular vacuum performance. SIMS End-Point detection integrated into the NQI-LL system automation provides process stability and repeatability.
More products from this company
- Nanoquest I - Ion Beam Etch System Jul 28, 2008
