New dynamic nanopositioning stage nanoSX 800 CAP Sep 29, 2008

The system provides unparalleled scanning and stroke capabilities of 800 µm in open loop and 640 µm in closed loop. An integrated capacitative sensor system eliminates hysteresis and drift, and enables extremely high stability, linearity, and repeatability in closed-loop operation.

Due to a special mechanical FEA-optimized design, the actuator has the highest dynamical features that can be achieved. Specially designed solid-state hinges create guidance without friction and without mechanical play.

The optimized bidirectional stage design of the nanopositioner nanoSX 800 CAP separates guidance and preload.

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