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DeltaPsi2 Software by HORIBA Jobin Yvon Nov 18, 2008
HORIBA Jobin Yvon, the leading manufacturer of spectroscopic ellipsometers for research & industry, offers an advanced thin film characterisation platform called DeltaPsi2.
The software applies to ellipsometry, polarimetry & reflectometry & controls all HORIBA Jobin Yvon thin film metrology instruments. DeltaPsi2 provides advanced measurements, modelling & reporting capabilities for accurate & flexible characterisation of thin film structures. Features include calculation of thicknesses, optical constants, gradients, anisotropy, alloy composition, bandgap calculation, surface roughness, EMA, backside corrections, multi combined measurements/analysis data & the largest materials database of optical constants.
Fab ellipsometers such as UT-300 and FF-1000, & in-line ellipsometers are also driven by the DeltaPsi2. This includes a fully automatic operating environment & advanced communication protocols (RS232, TCP/IP) for robust thin film metrology control.
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