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X-ray, EUV Spectrometer Jan 7, 2009


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The McPherson spectrometer enables simultaneous spectral detection over a wide range, reduces calibration errors, and increases the amount of data collected in a given amount of time.

McPherson is pleased to release an x-ray and EUV spectrometer, the 251MX, for wavelength dispersive spectral measurements from 0.6 to 20nm (60 to 2000eV.) The 251MX provides corrected, flat field spectra with its specially designed diffraction gratings. Data is acquired quickly and easily with direct-detection CCDs. Clean, stainless steel chamber and vacuum-prepared internal components allow efficient pumping for high vacuum or UHV. The 251MX’s small size simplifies integration to experiments. The available gratings have laminar design, to help reduce effects of high orders. The corrected grating designs deliver high resolution spectra. Applications include: soft x-ray plasma diagnostics, HHG EUV lasers, characterization of EUV sources for advanced lithography processes.