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UNCD Wafers Mar 6, 2009


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The Aqua series of UNCD® films from ADT are phase-pure nanocrystalline diamond films. ADT currently offers two families of UNCD wafers: DoSi™ Wafers and UNCD DOI™ wafers.

DoSi Wafers consist of UNCD Aqua varieties deposited directly on silicon wafers. Wafers are available in sizes of 100, 150, and 200 mm. UNCD wafers are excellent for starting MEMS device development with diamond.

DOI wafers consist of UNCD Aqua films deposited on standard silicon wafers that are first coated with a thermal oxide layer. These wafers meet baseline wafer-level specifications for thickness, property uniformity, wafer bow, and particle counts suitable for direct insertion into a MEMS foundry process sequence. DOI wafers are available in a variety of wafer sizes.

 

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