Atoms join in the race for lithography in the next century
Aug 1, 1998
An impressive technology has been developing since the
1960s to make the
tiny electronic devices that form the
basic circuits in today's computer chips.
Huge ultraclean buildings filled with lithography machines costing $2-4 million each churn out 20 000 silicon wafers every month,
producing more transistors per square millimetre for less money than ever before.
But many experts say that the
steady increases in circuit density will come to an abrupt halt if we do not come up with some radical new ideas.
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